Department of Engineering / Profiles / Professor Ashwin Seshia

Department of Engineering

Professor Ashwin Seshia


Ashwin Seshia

Professor in Microsystems Technology

Academic Division: Mechanics, Materials and Design

Research group: Applied Mechanics

Telephone: +44 1223 3 32755


Personal website


Research interests

My research interests are in the domain of micro/nano-electro-mechanical devices and integrated microsystems (MEMS). Micro/nano-engineered devices and systems are being developed with the ability to sense, condition and process domain-specific data about the physical world accurately and efficiently, and ongoing research in my group seeks to address the device physics and engineering underpinning MEMS technology.

Specific past research contributions have been to the investigation of device phenomena enabling new micro-engineered, integrated vibratory and acoustic devices with application to physical sensors, and time and frequency references. This work has resulted in a number of device and experimental firsts including (1) phase synchronization in coupled microelectromechanical oscillators demonstrating significant resulting improvements in frequency stability, (2) micromachined vibration energy harvesters based on the principle of parametric resonance enabling multi-frequency operation and enhancement in recoverable electrical power compared to alternative resonant approaches, (3) mode-localized sensing applied to inertial measurement and electrometry, and (4) electro-acoustic sensors based on anharmonic signal readout.

Ongoing research includes (1) approaches to energy-efficient processing and integration of sensory data, (2) probing noise processes and non-linear dynamics in MEMS devices, (3) multi-mode dynamics of vibratory silicon microstructures, and (4) developing miniaturised tools and associated techniques to probe complex physical systems at the micro- and nano-scale.

I am a co-founder of two companies, Silicon Microgravity and 8power, formed to translate technologies developed in my research group.

Strategic themes

Energy, transport and urban infrastructure

Co-investigator, Cambridge Centre for Smart Infrastructure and Construction

Manufacturing, design and materials

MEMS design and fabrication.


Microfabricated biophysical tools to characterise biological systems at the molecular, cellular and multi-cellular scales.

Complex, resilient and intelligent systems

Energy-efficient processing and integration of sensor data. 

Noisy and non-linear dynamics in MEMS/NEMS resonators and oscillators. 

Teaching activity

Part IA: Exposition

Part IIB: Random and Nonlinear Vibration

Part IIB: MEMS Design

Part IIB: Biosensors

​MRes: Centre for Doctoral Training in Sensor Technologies and Applications

MPhil: Micro- and Nano-technology


Ashwin A. Seshia received his BTech in Engineering Physics in 1996 from IIT Bombay, MS and PhD degrees in Electrical Engineering and Computer Sciences from the University of California, Berkeley in 1999 and 2002 respectively, and the MA from the University of Cambridge in 2008. He joined the faculty of the Engineering Department at the University of Cambridge in October 2002 where he is presently a Professor of Microsystems Technology and a Fellow of Queens' College. He is a Fellow of the Institute of Physics, a Fellow of the Institution for Engineering and Technology and a Fellow of the Institute of Electrical and Electronics Engineers. Prof Seshia currently serves on the editorial boards of the IEEE Journal of Microelectromechanical Systems and the IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, and the Executive Committee of the European Frequency and Time Forum. He received the 2018 IEEE Sensors Technical Achievement Award (Advanced Career - Sensor Systems) "for pioneering contributions to resonant microsystems with application to sub-surface density contrast imaging and energy harvesting systems".